Singler T J, Clum J A, Prack E R
Mechanical and Industrial Engineering Department, T.J. Watson School of Engineering, State University of New York, Binghamton 13902-6000.
Microsc Res Tech. 1993 Aug;25(5-6):509-17. doi: 10.1002/jemt.1070250523.
This paper provides a summary of some in situ, high-resolution studies of solder spreading reactions on microelectronic circuit metallizations. Experiments are described that focus on the use of the environmental scanning electron microscope, or ESEM. Those experiments have been complemented by studies using optical hot-stage microscopy and have been supplemented by additional analytical tools such as energy dispersive X-ray microanalysis, Auger and ESCA to evaluate chemical processes. Two general results from dynamic scanning electron microscope observations are that 1) molten solder alloys undergo a segregation process during spreading in which a "precursor" film spreads in advance of the bulk solder and 2) the spreading front, which may be enriched in Sn from Pb-Sn or Bi-Sn solders, or In from Pb-In solders, spreads along high-reactivity features of the metallization surface as a reacting "precursor" film. A third observation from these tests is that, in unconfined geometries, the reactive metallization, if not sufficiently thick, can be dissolved by the solder before wetting is complete, leading to dewetting of the solder. Both the kinetics and extent of spreading of these films and the relationship of these phenomena to the commonly measured contact angle and wetting forces are currently being examined by a range of complementary techniques. Information gathered in these studies shows that process temperature as well as composition, reactivity, and relative amounts of the solder and metallization species should all be factors of interest to the those responsible for control of soldering processes.
本文总结了一些关于微电子电路金属化上焊料铺展反应的原位高分辨率研究。描述了聚焦于环境扫描电子显微镜(ESEM)使用的实验。这些实验通过使用光学热台显微镜的研究得到补充,并通过能量色散X射线微分析、俄歇电子能谱和光电子能谱等额外分析工具来评估化学过程。动态扫描电子显微镜观察得到的两个一般结果是:1)熔融焊料合金在铺展过程中经历偏析过程,其中“前驱体”膜在块状焊料之前铺展;2)铺展前沿可能富含来自Pb-Sn或Bi-Sn焊料的Sn,或来自Pb-In焊料的In,作为反应性“前驱体”膜沿着金属化表面的高反应性特征铺展。这些测试的第三个观察结果是,在无约束的几何形状中,如果反应性金属化层不够厚,在润湿完成之前可能会被焊料溶解,导致焊料去湿。目前正在通过一系列互补技术研究这些膜的铺展动力学和程度以及这些现象与通常测量的接触角和润湿力之间的关系。这些研究中收集的信息表明,工艺温度以及焊料和金属化物种的成分、反应性和相对含量都应该是负责控制焊接过程的人员感兴趣的因素。