扫描离子微探针的一些改进建议。

Some proposed improvements in the scanning ion microprobe.

作者信息

Krohn V E, Ringo G R

出版信息

J Microsc. 1977 May;110(1):59-64. doi: 10.1111/j.1365-2818.1977.tb00013.x.

DOI:10.1111/j.1365-2818.1977.tb00013.x

Abstract

Three improvements, which we have investigated, promise to lead to a scanning ion microprobe with a space resolution of about 15 nm. The improvements are: (1) use of a field-evaporation (EHD) ion source with liquid gallium to give a brightness exceeding 10(10) A m-2 sr-1 at 21 KeV, (2) a high efficiency (10%) collecting system for secondary ions, and (3) enhancement of the secondary-ion yield by cesium deposition. With this instrument, tracing with stable isotopes would offer a number of advantages over autoradiography.

摘要

我们所研究的三项改进措施有望打造出一款空间分辨率约为15纳米的扫描离子微探针。这些改进措施包括：（1）使用配备液态镓的场蒸发（EHD）离子源，在21千电子伏特时亮度超过10¹⁰ 安·米⁻²·球面度⁻¹；（2）采用高效（10%）的二次离子收集系统；（3）通过铯沉积提高二次离子产率。借助该仪器，使用稳定同位素进行示踪将比放射自显影具有诸多优势。