McCaffrey J P, Barna A
Institute for Microstructural Sciences, National Research Council of Canada, Ottawa, Canada.
Microsc Res Tech. 1997 Mar 1;36(5):362-7. doi: 10.1002/(SICI)1097-0029(19970301)36:5<362::AID-JEMT3>3.0.CO;2-N.
The ideal ion-milled transmission electron microscope (TEM) sample would contain large, thin areas in selected regions, minimal top and bottom surface amorphization, and minimal preferential etching of adjacent materials. This desire has led to studies of these effects and improvements in designs and techniques for ion mills. Minimizing the incident angle of the ion beam to the surface of the sample has been found to be one of the most effective techniques for fulfilling these requirements. A new generation of ion mills has recently been designed to allow low-angle ion milling for the production of very high quality cross-sectional TEM samples. To take advantage of the low-angle ion milling capabilities and high-powered ion sources in these mills, new sample preparation techniques are required. In this paper, a simple technique of mounting material in a specialized titanium grid for cross-sectional TEM sample preparation is presented. This technique is designed to take full advantage of the powerful capabilities of these new low-angle ion mills.
理想的离子研磨透射电子显微镜（TEM）样品应在选定区域包含大的薄区域、最小的顶面和底面非晶化以及相邻材料的最小优先蚀刻。这种需求促使人们对这些效应进行研究，并改进离子研磨机的设计和技术。已发现将离子束与样品表面的入射角最小化是满足这些要求的最有效技术之一。最近设计了新一代离子研磨机，以允许进行低角度离子研磨，用于制备非常高质量的横截面TEM样品。为了利用这些研磨机的低角度离子研磨能力和高功率离子源，需要新的样品制备技术。本文介绍了一种将材料安装在专门的钛网上以制备横截面TEM样品的简单技术。该技术旨在充分利用这些新型低角度离子研磨机的强大功能。
