The efficiency of X-ray production at low energies.

The absolute efficiency of X-ray production has been determined for the K-lines of Al, Si and Cu; for the L-lines of Fe, Co, Cu, Ge and As; and for the M-lines of Hf, Ir, Pt, Au and Bi, using overvoltage ratios in the range 1-10. These emissions, with the exception of the Cu K, have critical excitation energies below 2.6 keV and are therefore typical of the lines used for X-ray microanalysis at low beam energies. For K-lines it is found that the experimental results are in good agreement with a Bethe, or a Casnati, crosssection model. For the L- and M-lines a Monte Carlo technique has been used to find an effective X-ray generation cross-section for each of the elements. The functional forms of these cross-sections are found to be in general agreement with proposed theoretical models.