The use of backscattered electrons for imaging purposes in a scanning electron microscope.

It is shown that the use of a very large detector for backscattered electrons can provide a signal comparable to that obtained in the secondary emission mode and that the resolution available is also comparable. A technique is described whereby the difference is taken between these two signals, and the use of this difference signal can significantly enhance surface details. It is believed that the use of such a signal should ultimately prove advantageous in increasing resolution.