Contribution of electron energy loss spectroscopy to the development of analytical electron microscopy.

The combined use of an electron energy loss spectrometer and an electron microscope provides some chemical information at the nanometer scale. The physics of the interaction processes between the incident electron beam and the thin sample foil is reviewed in terms of energy and momentum transfer. This analysis of the content of an electron energy loss spectrum allows us to establish rules for a satisfactory use of the information and to discuss the detection limits of this newly developed microanalytical technique.