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从电子能量损失谱到多维多信号电子显微镜

From electron energy-loss spectroscopy to multi-dimensional and multi-signal electron microscopy.

作者信息

Colliex Christian

机构信息

Laboratoire de Physique des Solides (UMR CNRS 8502), Université Paris Sud, Bldg. 510, 91405 Orsay, France.

出版信息

J Electron Microsc (Tokyo). 2011;60 Suppl 1:S161-71. doi: 10.1093/jmicro/dfr028.

DOI:10.1093/jmicro/dfr028
PMID:21844587
Abstract

This review intends to illustrate how electron energy-loss spectroscopy (EELS) techniques in the electron microscope column have evolved over the past 60 years. Beginning as a physicist tool to measure basic excitations in solid thin foils, EELS techniques have gradually become essential for analytical purposes, nowadays pushed to the identification of individual atoms and their bonding states. The intimate combination of highly performing techniques with quite efficient computational tools for data processing and ab initio modeling has opened the way to a broad range of novel imaging modes with potential impact on many different fields. The combination of Angström-level spatial resolution with an energy resolution down to a few tenths of an electron volt in the core-loss spectral domain has paved the way to atomic-resolved elemental and bonding maps across interfaces and nanostructures. In the low-energy range, improved energy resolution has been quite efficient in recording surface plasmon maps and from them electromagnetic maps across the visible electron microscopy (EM) domain, thus bringing a new view to nanophotonics studies. Recently, spectrum imaging of the emitted photons under the primary electron beam and the spectacular introduction of time-resolved techniques down to the femtosecond time domain, have become innovative keys for the development and use of a brand new multi-dimensional and multi-signal electron microscopy.

摘要

本综述旨在阐述电子显微镜柱中的电子能量损失谱(EELS)技术在过去60年中的发展历程。EELS技术最初是作为一种用于测量固体薄箔中基本激发的物理工具,如今已逐渐成为分析用途的关键技术,目前已发展到可用于识别单个原子及其键合状态。高性能技术与用于数据处理和从头算建模的高效计算工具的紧密结合,为一系列新型成像模式开辟了道路,这些成像模式对许多不同领域都具有潜在影响。在芯损失光谱域中,埃级空间分辨率与低至十分之几电子伏特的能量分辨率相结合,为跨界面和纳米结构的原子分辨元素和键合图谱铺平了道路。在低能量范围内,提高的能量分辨率在记录表面等离子体图谱以及由此生成的整个可见电子显微镜(EM)域的电磁图谱方面非常有效,从而为纳米光子学研究带来了新视角。最近,在初级电子束下对发射光子进行光谱成像以及将时间分辨技术引入到飞秒时域,已成为全新的多维和多信号电子显微镜开发与应用的创新关键。

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