Isabell TC, Fischione PE, O'Keefe C, Guruz MU, Dravid VP
Fischione Research, 9003 Corporate Circle, Export, PA 15632
Microsc Microanal. 1999 Mar;5(2):126-135. doi: 10.1017/S1431927699000094.
: The effectiveness of applying a high-frequency, low-energy, reactive gas plasma for the removal of hydrocarbon contamination from specimens and components for electron microscopy has been investigated with a variety of analytical techniques. Transmission electron microscopy (TEM) analysis of specimens that have been plasma cleaned shows an elimination of the carbonaceous contamination from the specimen. With extended cleaning times the removal of existing carbon contamination debris due to previously conducted microanalysis is shown. Following plasma cleaning, specimens may be examined in the electron microscope for several hours without exhibiting evidence of recontamination. The effectiveness of plasma cleaning is not limited to applications for TEM specimens. Scanning electron microscopy (SEM) specimens that have been plasma cleaned likewise show an elimination of carbonaceous contamination. Furthermore, other electron microscopy parts and accessories, such as aperture strips, specimen clamping rings, and Wehnelts, among others, can benefit from plasma cleaning.
已经使用多种分析技术研究了应用高频、低能量、反应性气体等离子体去除电子显微镜标本和部件中碳氢化合物污染物的有效性。对经过等离子体清洁的标本进行透射电子显微镜（TEM）分析表明，标本中的碳质污染物已被消除。随着清洁时间的延长，先前进行的微量分析产生的现有碳污染碎片也被去除。经过等离子体清洁后，标本可以在电子显微镜中检查数小时而不会出现重新污染的迹象。等离子体清洁的有效性不仅限于TEM标本的应用。经过等离子体清洁的扫描电子显微镜（SEM）标本同样显示出碳质污染物的消除。此外，其他电子显微镜部件和配件，如孔径条、标本夹环和韦内尔特等，也可以从等离子体清洁中受益。
