Khan M Y, Brown L M, Chaudhri M M
Cavendish Laboratory, Cambridge, England.
J Electron Microsc Tech. 1990 Aug;15(4):377-82. doi: 10.1002/jemt.1060150407.
Single crystal MgO specimens having low load Vickers indentations were thinned in an ion milling machine employing a single ion gun, and their characteristics were investigated with optical microscopy and high voltage electron microscopy (HVEM). It was found that the state of cleanliness of the specimen chamber of the ion milling machine had a very marked influence on the quality of the thinned specimens. If the specimen chamber was not well cleaned before ion milling a fresh specimen, the latter tended to show amorphisation due to the deposition on the specimen of the debris left in the chamber from the previously ion-milled specimens. Such observations were made from MgO specimens ion milled in several different types of commercial ion milling machine employing a single gun. It is proposed that to obtain good-quality ion milled TEM specimens, it is important to clean the specimen chamber thoroughly prior to milling.
对带有低负荷维氏压痕的单晶氧化镁试样，在使用单离子枪的离子研磨机中进行减薄处理，并用光学显微镜和高压电子显微镜（HVEM）对其特性进行研究。结果发现，离子研磨机试样腔的清洁状态对减薄试样的质量有非常显著的影响。如果在对新试样进行离子研磨之前，试样腔没有彻底清洁，由于先前离子研磨试样留在腔中的碎屑沉积在试样上，新试样往往会出现非晶化现象。在几种不同类型使用单枪的商用离子研磨机中对氧化镁试样进行离子研磨时都有这样的观察结果。建议为了获得高质量的离子研磨透射电子显微镜试样，在研磨之前彻底清洁试样腔很重要。
