Kenis PJ, Ismagilov RF, Whitesides GM
Department of Chemistry and Chemical Biology, Harvard University, 12 Oxford Street, Cambridge, MA 02138, USA.
Science. 1999 Jul 2;285(5424):83-5. doi: 10.1126/science.285.5424.83.
The reaction of species in solutions flowing laminarly (without turbulent mixing) inside capillaries was used as the basis for a broadly applicable method of microfabrication. In this method, patterning occurs as a result of transport of reactive species to interfaces within the capillary by laminar flow. A wide range of chemistries can be used to generate structures with feature sizes of less than 5 micrometers and with spatial localization to within 5 micrometers. The method is applicable to the patterning of metals, organic polymers, inorganic crystals, and ceramics on the inner walls of preformed capillaries, using both additive and subtractive processes.
毛细管内呈层流(无湍流混合)流动的溶液中物质间的反应被用作一种广泛适用的微制造方法的基础。在这种方法中,图案形成是由于反应性物质通过层流传输到毛细管内的界面所致。可以使用多种化学方法来生成特征尺寸小于5微米且空间定位在5微米以内的结构。该方法适用于在预制毛细管的内壁上对金属、有机聚合物、无机晶体和陶瓷进行图案化,既可以采用添加法也可以采用减法工艺。