紧凑型水窗透射X射线显微镜。

Compact water-window transmission X-ray microscopy.

作者信息

Berglund M, Rymell L, Peuker M, Wilhein T, Hertz H M

机构信息

Biomedical and X-Ray Physics, Royal Institute of Technology, SE-10044 Stockholm, Sweden; Forschungseinrichtung Röntgenphysik, Georg-August Universität, D-37073 Göttingen, Germany.

出版信息

J Microsc. 2000 Mar;197(Pt 3):268-73. doi: 10.1046/j.1365-2818.2000.00675.x.

DOI:10.1046/j.1365-2818.2000.00675.x

PMID:10692130

Abstract

We demonstrate sub-100 nm resolution water-window soft X-ray full-field transmission microscopy with a compact system. The microscope operates at lambda = 3.37 nm and is based on a 100 Hz table-top regenerative debris-free droplet-target laser-plasma X-ray source in combination with normal-incidence multilayer condenser optics for sample illumination. High-spatial-resolution imaging is performed with a 7.3% efficiency nickel zone plate and a 1024 x 1024 pixel CCD detector. Images of dry test samples are recorded with exposure times of a few minutes and show features smaller than 60 nm.

摘要

我们展示了一种采用紧凑型系统的分辨率低于100纳米的水窗软X射线全场透射显微镜。该显微镜工作波长为λ = 3.37纳米，基于一个100赫兹的桌面式无碎片液滴靶再生激光等离子体X射线源，并结合用于样品照明的正入射多层聚光镜光学元件。利用效率为7.3%的镍波带片和1024×1024像素的电荷耦合器件（CCD）探测器进行高空间分辨率成像。干燥测试样品的图像在几分钟的曝光时间内记录下来，显示出小于60纳米的特征。