Zhang Y, Wang Z, Cheeke JD
Physics Department, Concordia University, Montreal, Quebec, Canada.
Ultrasonics. 2000 Mar;38(1-8):114-7. doi: 10.1016/s0041-624x(99)00172-9.
An approximate formula has been developed to determine the electromechanical coupling coefficient of the piezoelectric film in a four-layer composite resonator, which includes two electrodes. In this formula, the coupling coefficient can be calculated from the distribution of the effective coupling coefficients, k2eff, which are given by the modal frequency spectrum of the composite resonator. The feasibility of this method has been demonstrated with a ZnO/SiO2 composite resonator for different electrode thickness. The effect of mechanical propagation loss in both piezoelectric layer and substrate has also been studied.
已开发出一个近似公式来确定包含两个电极的四层复合谐振器中压电薄膜的机电耦合系数。在该公式中，耦合系数可根据有效耦合系数k2eff的分布来计算，有效耦合系数由复合谐振器的模态频谱给出。对于不同电极厚度的ZnO/SiO2复合谐振器，已证明了该方法的可行性。还研究了压电层和衬底中机械传播损耗的影响。
