Xie Ying, Liu Yan, Liu Jieyu, Wang Lei, Liu Wenjuan, Soon Bo Woon, Cai Yao, Sun Chengliang
The Institute of Technological Sciences, Wuhan University, Wuhan 430072, China.
Hubei Yangtze Memory Laboratories, Wuhan 430205, China.
Micromachines (Basel). 2022 Apr 18;13(4):641. doi: 10.3390/mi13040641.
A resonator with an appropriate electromechanical coupling coefficient (Kt2) is crucial for filter applications in radio communication. In this paper, we present an effective method to tune the Kt2 of resonators by introducing different materials into a lithium niobate (LiNbO) piezoelectric matrix. The effective piezoelectric coefficients e33eff and e15eff of composite materials with four different introduced materials were calculated. The results show that the e15eff of SiO/LiNbO composite piezoelectric material was mostly sensitive to an increase in the width of introduced SiO material. Simultaneously, the simulation of a laterally excited bulk wave resonator (XBAR) with SiO/LiNbO composite material was also carried out to verify the change in the Kt2 originating from the variation in e15eff. The achievable n79 filter using the SiO/LiNbO composite material demonstrates the promising prospects of tuning Kt2 by introducing different materials into a LiNbO piezoelectric matrix.
对于无线电通信中的滤波器应用而言，具有合适机电耦合系数（Kt2）的谐振器至关重要。在本文中，我们提出了一种有效的方法，通过将不同材料引入铌酸锂（LiNbO）压电基体中来调节谐振器的Kt2。计算了含有四种不同引入材料的复合材料的有效压电系数e33eff和e15eff。结果表明，SiO/LiNbO复合压电材料的e15eff对引入的SiO材料宽度增加最为敏感。同时，还对采用SiO/LiNbO复合材料的横向激励体声波谐振器（XBAR）进行了仿真，以验证由e15eff变化引起的Kt2变化。使用SiO/LiNbO复合材料实现的n79滤波器展示了通过将不同材料引入LiNbO压电基体来调节Kt2的广阔前景。
