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高泛音体声波谐振器有效机电耦合系数的共振频谱特性

Resonance Spectrum Characteristics of Effective Electromechanical Coupling Coefficient of High-Overtone Bulk Acoustic Resonator.

作者信息

Li Jian, Liu Mengwei, Wang Chenghao

机构信息

Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China.

University of Chinese Academy of Sciences, Beijing 100049, China.

出版信息

Micromachines (Basel). 2016 Sep 6;7(9):159. doi: 10.3390/mi7090159.

DOI:10.3390/mi7090159
PMID:30404332
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC6190344/
Abstract

A high-overtone bulk acoustic resonator (HBAR) consisting of a piezoelectric film with two electrodes on a substrate exhibits a high quality factor () and multi-mode resonance spectrum. By analyzing the influences of each layer's material and structure (thickness) parameters on the effective electromechanical coupling coefficient (²), the resonance spectrum characteristics of ² have been investigated systematically, and the optimal design of HBAR has been provided. Besides, a device, corresponding to one of the theoretical cases studied, is fabricated and evaluated. The experimental results are basically consistent with the theoretical results. Finally, the effects of ² on the function of the crystal oscillators constructed with HBARs are proposed. The crystal oscillators can operate in more modes and have a larger frequency hopping bandwidth by using the HBARs with a larger ²·.

摘要

一种由在衬底上带有两个电极的压电薄膜组成的高音体声波谐振器（HBAR）具有高品质因数（）和多模共振光谱。通过分析各层材料和结构（厚度）参数对有效机电耦合系数（²）的影响，系统地研究了²的共振光谱特性，并给出了HBAR的优化设计。此外，制造并评估了与所研究的一种理论情况相对应的器件。实验结果与理论结果基本一致。最后，提出了²对用HBAR构建的晶体振荡器功能的影响。通过使用具有更大²·的HBAR，晶体振荡器可以在更多模式下工作并具有更大的跳频带宽。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d015/6190344/6d7ad258a94d/micromachines-07-00159-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d015/6190344/751a0d79e987/micromachines-07-00159-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d015/6190344/ffd40e8ce3a6/micromachines-07-00159-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d015/6190344/f73bd68be29a/micromachines-07-00159-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d015/6190344/cb7346bdf87a/micromachines-07-00159-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d015/6190344/799d9e806bc0/micromachines-07-00159-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d015/6190344/968cc176e23c/micromachines-07-00159-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d015/6190344/6219397f84bb/micromachines-07-00159-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d015/6190344/8ab41babceca/micromachines-07-00159-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d015/6190344/6d7ad258a94d/micromachines-07-00159-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d015/6190344/751a0d79e987/micromachines-07-00159-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d015/6190344/ffd40e8ce3a6/micromachines-07-00159-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d015/6190344/f73bd68be29a/micromachines-07-00159-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d015/6190344/cb7346bdf87a/micromachines-07-00159-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d015/6190344/799d9e806bc0/micromachines-07-00159-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d015/6190344/968cc176e23c/micromachines-07-00159-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d015/6190344/6219397f84bb/micromachines-07-00159-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d015/6190344/8ab41babceca/micromachines-07-00159-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d015/6190344/6d7ad258a94d/micromachines-07-00159-g009.jpg

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本文引用的文献

1
Extremely low phase noise UHF oscillators utilizing high-overtone, bulk-acoustic resonators.采用高泛音体声波谐振器的极低相位噪声超高频振荡器。
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Electrode effects on general modes in high-overtone bulk acoustic resonators.
电极对高泛音体声波谐振器一般模式的影响。
Ultrasonics. 2006 Dec 22;44 Suppl 1:e737-40. doi: 10.1016/j.ultras.2006.05.085. Epub 2006 Jun 5.
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Electrode effects on frequency spectra and electromechanical coupling factors of HBAR.电极对声表面波谐振器频率谱和机电耦合系数的影响。
IEEE Trans Ultrason Ferroelectr Freq Control. 2005 Jun;52(6):1020-5. doi: 10.1109/tuffc.2005.1504024.
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Parameter characterization of high-overtone bulk acoustic resonators by resonant spectrum method.基于共振频谱法的高泛音体声波谐振器参数表征
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