Anisimkin V I, Verona E
Institute of Radioengineering and Electronics, Russian Academy of Sciences, Moscow.
IEEE Trans Ultrason Ferroelectr Freq Control. 2001 Sep;48(5):1413-8. doi: 10.1109/58.949751.
It is shown how the performances of SAW gas sensors can be optimized based on pure acoustic peculiarities of SAW propagation in anisotropic single crystals. For a given gas and sensitive membrane, the calibration curve (dependence of the response R versus gas concentration n), the sensitivity S (slope of the calibration curve: S = dR/dn), the detection limit nth, (cut-off of the curve at the threshold Pthr), and the resolution deltan of the sensor (recognition of two close concentrations) can be controlled by a proper choice of the substrate material and its crystallographic orientation (cut and direction of the SAW propagation). An experimental test of this property is performed on SAW devices implemented on different substrate materials and crystallographic orientations, both uncoated or coated, with a sorbent membrane of polycrystalline Pd or Pd:Ni film, upon exposure to humid air as a test analyte.
展示了如何基于声表面波（SAW）在各向异性单晶中传播的纯声学特性来优化SAW气体传感器的性能。对于给定的气体和敏感膜，校准曲线（响应R与气体浓度n的关系）、灵敏度S（校准曲线的斜率：S = dR/dn）、检测限nth（曲线在阈值Pthr处的截止值）以及传感器的分辨率deltan（两种相近浓度的识别）可以通过适当选择衬底材料及其晶体取向（SAW传播的切割和方向）来控制。针对在不同衬底材料和晶体取向上实现的SAW器件进行了这一特性的实验测试，这些器件无论是未涂层还是涂覆有作为测试分析物的多晶钯或钯镍膜的吸附剂膜，均暴露于潮湿空气中。
