Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China.
School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100190, China.
Sensors (Basel). 2018 Nov 6;18(11):3796. doi: 10.3390/s18113796.
In this contribution, a new surface acoustic wave (SAW)-based sensor was proposed for sensing hydrogen sulfide (H₂S) at room temperature (30 °C), which was composed of a phase discrimination circuit, a SAW-sensing device patterned with delay line, and a triethanolamine (TEA) coating along the SAW propagation path of the sensing device. The TEA was chosen as the sensitive interface for H₂S sensing, owing to the high adsorption efficiency by van der Waals' interactions and hydrogen bonds with H₂S molecules at room temperature. The adsorption in TEA towards H₂S modulates the SAW propagation, and the change in the corresponding phase was converted into voltage signal proportional to H₂S concentration was collected as the sensor signal. A SAW delay line patterned on Y-cut quartz substrate with Al metallization was developed photographically, and lower insertion and excellent temperature stability were achieved thanks to the single-phase unidirectional transducers (SPUDTs) and lower cross-sensitivity of the piezoelectric substrate. The synthesized TEA by the reaction of ethylene oxide and ammonia was dropped into the SAW propagation path of the developed SAW device to build the H₂S sensor. The developed SAW sensor was characterized by being collecting into the phase discrimination circuit. The gas experimental results appear that fast response (7 s at 4 ppm H₂S), high sensitivity (0.152 mV/ppm) and lower detection limit (0.15 ppm) were achieved at room temperature. It means the proposed SAW sensor will be promising for H₂S sensing.
在本项工作中,提出了一种基于声表面波(SAW)的室温(30°C)硫化氢(H₂S)传感器,其由鉴相电路、具有延迟线图案的 SAW 传感器以及沿传感器传播路径涂覆的三乙醇胺(TEA)涂层组成。选择 TEA 作为 H₂S 传感的敏感界面,这是因为 TEA 在室温下通过范德华相互作用和氢键与 H₂S 分子具有很高的吸附效率。TEA 对 H₂S 的吸附会调制 SAW 的传播,并且相应相位的变化会转换为与 H₂S 浓度成正比的电压信号,作为传感器信号进行收集。采用光刻法在 Y 切石英衬底上制作了具有铝金属化的 SAW 延迟线,并通过单相单指向换能器(SPUDT)和较低的压电衬底交叉灵敏度实现了较低的插入损耗和出色的温度稳定性。通过氧化乙烯和氨的反应合成的 TEA 被滴入到所开发的 SAW 器件的 SAW 传播路径中,以构建 H₂S 传感器。通过相位鉴别电路对所开发的 SAW 传感器进行了特性表征。气体实验结果表明,在室温下实现了快速响应(4 ppm H₂S 时为 7 s)、高灵敏度(0.152 mV/ppm)和较低的检测限(0.15 ppm)。这意味着所提出的 SAW 传感器在 H₂S 传感方面具有广阔的应用前景。