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用于氢气传感的高稳定性钯镍合金薄膜涂层声表面波器件的研制

Development of a High Stability Pd-Ni Alloy Thin-Film Coated SAW Device for Sensing Hydrogen.

作者信息

Wang Wen, Liu Xueli, Mei Shengchao, Liu Mengwei, Lu Chao, Lu Minghui

机构信息

Key Laboratory of Non-Destructive Testing Ministry of Education, Nanchang HangKong University, Nanchang 330063, China.

Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China.

出版信息

Sensors (Basel). 2019 Aug 15;19(16):3560. doi: 10.3390/s19163560.

DOI:10.3390/s19163560
PMID:31443271
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC6721225/
Abstract

A Pd-Ni alloy thin-film coated surface acoustic wave (SAW) device is proposed for sensing hydrogen. The Pd-Ni thin-film was sputtered onto the SAW propagation path of a SAW device with a delay line pattern to build the chip-sized hydrogen sensor. The prepared sensor chip was characterized by employing a differential oscillation loop. The effect of the Pd-Ni film thickness on sensing performance was also evaluated, and optimal parameters were determined, allowing for fast response and high sensitivity. Excellent working stability (detection error of 3.7% in half a year), high sensitivity (21.3 kHz/%), and fast response (less than 10 s) were achieved from the 40 nm Pd-Ni alloy thin-film coated sensing device.

摘要

提出了一种用于氢气传感的钯镍合金薄膜涂层表面声波（SAW）器件。将钯镍薄膜溅射在具有延迟线图案的SAW器件的SAW传播路径上，以制造芯片尺寸的氢气传感器。采用差分振荡回路对制备的传感器芯片进行了表征。还评估了钯镍膜厚度对传感性能的影响，并确定了最佳参数，以实现快速响应和高灵敏度。40nm钯镍合金薄膜涂层传感装置实现了出色的工作稳定性（半年检测误差为3.7%）、高灵敏度（21.3kHz/%）和快速响应（小于10秒）。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8619/6721225/db0f7f4e8193/sensors-19-03560-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8619/6721225/9916a0084ba5/sensors-19-03560-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8619/6721225/b6ad93fcd062/sensors-19-03560-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8619/6721225/480d1146fbb2/sensors-19-03560-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8619/6721225/110c3be06acc/sensors-19-03560-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8619/6721225/221b6502bd8c/sensors-19-03560-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8619/6721225/036cdc7d0903/sensors-19-03560-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8619/6721225/61f601c50758/sensors-19-03560-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8619/6721225/5cd9fda485da/sensors-19-03560-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8619/6721225/ca0bed917270/sensors-19-03560-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8619/6721225/db0f7f4e8193/sensors-19-03560-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8619/6721225/9916a0084ba5/sensors-19-03560-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8619/6721225/b6ad93fcd062/sensors-19-03560-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8619/6721225/480d1146fbb2/sensors-19-03560-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8619/6721225/110c3be06acc/sensors-19-03560-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8619/6721225/221b6502bd8c/sensors-19-03560-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8619/6721225/036cdc7d0903/sensors-19-03560-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8619/6721225/61f601c50758/sensors-19-03560-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8619/6721225/5cd9fda485da/sensors-19-03560-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8619/6721225/ca0bed917270/sensors-19-03560-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8619/6721225/db0f7f4e8193/sensors-19-03560-g010.jpg

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