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扫描电子显微镜的湿态改进

A wet stage modification to a scanning electron microscope.

作者信息

Robinson V N

出版信息

J Microsc. 1975 Jan;103(1):71-7. doi: 10.1111/j.1365-2818.1975.tb04538.x.

DOI:10.1111/j.1365-2818.1975.tb04538.x
PMID:1173604
Abstract

A modification to the vacuum system of a JSM2 scanning electron microscope has enabled hydrated specimens to be placed inside the specimen chamber of the instrument and to be surronded by water vapour at a pressure up to approximately I 3-kPa (10 Torr). The surface topography was observed by detecting the backscattered electrons using a wide angle backscattered electron detector placed close to the specimen. The microscope was operated in the normal scanning mode which allowed the examination of the surface topography of the specimens, whilst still retaining the depth of focus which is a feature of the SEM. This modification has enabled a resolution of approximately 0.2 mum to be obtained from biological specimens partially immersed in water at temperatures just above 0 degrees C.

摘要

对JSM2扫描电子显微镜真空系统的一项改进,使得含水标本能够放置在仪器的标本室内,并被压力高达约1.3千帕(10托)的水蒸气所包围。使用靠近标本放置的广角背散射电子探测器检测背散射电子,从而观察表面形貌。显微镜以正常扫描模式运行,这既可以检查标本的表面形貌,同时又能保留扫描电子显微镜特有的焦深。这种改进使得在略高于0摄氏度的温度下,从部分浸入水中的生物标本中获得了约0.2微米的分辨率。

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