Kuzyk Casimir, Dimitrakopoulos Alexander, Nojeh Alireza
Department of Electrical and Computer Engineering, The University of British Columbia, Vancouver, BC, Canada.
Quantum Matter Institute, The University of British Columbia, Vancouver, BC, Canada.
Nat Commun. 2025 Aug 28;16(1):8067. doi: 10.1038/s41467-025-63413-2.
The scanning electron microscope (SEM) delivers high resolution, high depth of field, and an image quality as if microscopic objects are seen by the naked eye. This makes it not only a powerful scientific instrument, but a tool inherently applicable to nearly all fields of study and curiosity involving the small scale. However, SEMs have remained complex, expensive, and beyond the reach of many. To broaden access, we demonstrate an SEM using simple, low-cost, off-the-shelf components, and hobby-level electromechanics; this has been enabled by a thermionic electron source based on a carbon nanotube array excited by low optical power. The instrument offers sub-micrometer resolution, a depth of field of the order of a hundred micrometers, and an image quality comparable to commercial SEMs; it also tolerates poor vacuum and moist specimens, making it broadly applicable. It has a flexible design that lends itself to customization for different use scenarios. We describe the conceptual approach and high-level design in this paper; the detailed blueprints of our specific implementation are provided separately online. We hope that specialists and non-specialists alike will build variations that fit their own needs and interests, helping electron microscopy expand further into industry and society.
扫描电子显微镜(SEM)具有高分辨率、高景深,其图像质量就如同用肉眼观察微观物体一样。这使得它不仅是一种强大的科学仪器,而且是一种本质上适用于几乎所有涉及微观尺度的研究和探索领域的工具。然而,扫描电子显微镜一直以来都很复杂、昂贵,许多人难以企及。为了扩大其可及性,我们展示了一种使用简单、低成本的现成组件和业余水平机电装置的扫描电子显微镜;这得益于一种基于由低光功率激发的碳纳米管阵列的热离子电子源。该仪器具有亚微米级分辨率、约一百微米的景深,以及与商用扫描电子显微镜相当的图像质量;它还能耐受低真空和潮湿的样本,具有广泛的适用性。它的设计灵活,便于针对不同的使用场景进行定制。我们在本文中描述了概念方法和高层次设计;我们具体实施方案的详细蓝图另行在网上提供。我们希望专家和非专家都能制造出符合自身需求和兴趣的变体,帮助电子显微镜进一步向工业和社会领域拓展。