Thong J T, Lee K W, Wong W K
Centre for Integrated Circuit Failure Analysis and Reliability (CICFAR), Faculty of Engineering, National University of Singapore, Singapore.
Scanning. 2001 Nov-Dec;23(6):395-402. doi: 10.1002/sca.4950230606.
We describe a vector scanning system to reduce charging effects during scanning electron microscope (SEM) imaging. The vector scan technique exploits the intrinsic charge decay mechanism of the specimen to improve imaging conditions. We compare SEM images obtained by conventional raster scanning versus vector scanning to demonstrate that vector scanning successfully reduces specimen-charging artifacts.
我们描述了一种矢量扫描系统，以减少扫描电子显微镜（SEM）成像过程中的充电效应。矢量扫描技术利用了样品固有的电荷衰减机制来改善成像条件。我们比较了通过传统光栅扫描与矢量扫描获得的SEM图像，以证明矢量扫描成功减少了样品充电伪像。
