Suzuki Kazuhiko, Oho Eisaku
Faculty of Informatics, Department of Information Design, Kogakuin University, Tokyo, Japan.
Scanning. 2014 May-Jun;36(3):327-33. doi: 10.1002/sca.21112. Epub 2013 Jul 29.
A special raster scanning (SRS) method for reduction of charging effects is developed for the field of SEM. Both a conventional fast scan (horizontal direction) and an unusual scan (vertical direction) are adopted for acquiring raw data consisting of many sub-images. These data are converted to a proper SEM image using digital image processing techniques. About sharpness of the image and reduction of charging effects, the SRS is compared with the conventional fast scan (with frame-averaging) and the conventional slow scan. Experimental results show the effectiveness of SRS images. By a successful combination of the proposed scanning method and low accelerating voltage (LV)-SEMs, it is expected that higher-quality SEM images can be more easily acquired by the considerable reduction of charging effects, while maintaining the resolution.
为扫描电子显微镜（SEM）领域开发了一种用于减少充电效应的特殊光栅扫描（SRS）方法。采用传统的快速扫描（水平方向）和不寻常的扫描（垂直方向）来获取由许多子图像组成的原始数据。使用数字图像处理技术将这些数据转换为合适的SEM图像。在图像清晰度和充电效应减少方面，将SRS与传统的快速扫描（带帧平均）和传统的慢速扫描进行了比较。实验结果表明了SRS图像的有效性。通过将所提出的扫描方法与低加速电压（LV）-SEM成功结合，预计通过大幅减少充电效应，同时保持分辨率，可以更容易地获取更高质量的SEM图像。
