Schreiner Roland, Beyerlein Mathias, Harder Irina, Dresel Thomas, Lindlein Norbert, Schwider Johannes
Lehrstuhl für Optik, Erlangen, Germany.
Appl Opt. 2002 Jan 1;41(1):64-9. doi: 10.1364/ao.41.000064.
Grazing-incidence interferometry that makes use of diffractive axicons for the measurement of cylindrical mantle surfaces has already been reported. However, measurement of concave rod structures poses a severe problem because these structures are subject to spurious fringes caused by parasitic diffraction orders of the diffractive axicons. By breaking the symmetry of the interferometric setup it is possible to obtain unique interferograms of the inner mantle surfaces of hollow cylinders as cages for roller bearings or other workpieces produced on lathe machines that have a suitable surface finish. Special design issues for the computer-generated holograms and the interferometric setup are discussed, and test examples are given.
利用衍射轴锥镜测量圆柱体外表面的掠入射干涉测量法已有报道。然而，凹杆结构的测量存在严重问题，因为这些结构会受到衍射轴锥镜寄生衍射级次引起的杂散条纹的影响。通过打破干涉测量装置的对称性，可以获得空心圆柱体内部表面的独特干涉图，这些空心圆柱体可作为滚柱轴承或其他在车床上加工且具有合适表面光洁度的工件的保持架。讨论了计算机生成全息图和干涉测量装置的特殊设计问题，并给出了测试示例。
