Rothau S, Mantel K, Lindlein N
Appl Opt. 2021 Jan 1;60(1):52-59. doi: 10.1364/AO.410071.
Grazing incidence interferometry has been applied to plane, cylindrical, acylindrical, and general rod-like surfaces using diffractive beam splitters. Here, in a first step towards measuring aspherics, we demonstrate that also rough convex steep rotationally symmetric spherics can be measured along one meridian in a single step using diffractive beam splitters and phase shifting techniques. The measurement of rough surfaces is possible, i.e., without the need to polish the surfaces, due to the large effective wavelength (≈10µm) of the test. We include, besides the short recapitulation of the measurement principle and experimental setup, a presentation of the measured data of one small meridian region for the special case of spherical objects under test. The subsequent data analysis combined with suitable simulations focuses on elimination of the misalignment aberrations from the results caused by specimen displacements in the setup.
掠入射干涉测量法已通过衍射分束器应用于平面、圆柱面、非圆柱面和一般的棒状表面。在此，作为测量非球面的第一步，我们证明了使用衍射分束器和相移技术，也可以在单个步骤中沿一条子午线测量粗糙的凸形陡峭旋转对称球面。由于测试的有效波长较大（约10μm），因此可以测量粗糙表面，即无需对表面进行抛光。除了简短回顾测量原理和实验装置外，我们还给出了被测球形物体特殊情况下一个小子午线区域的测量数据。随后结合适当模拟的数据分析着重于消除由装置中样品位移导致的结果中的对准误差。
