Rothau S, Lindlein N, Schwider J
Appl Opt. 2019 Nov 20;58(33):9082-9088. doi: 10.1364/AO.58.009082.
In the past, grazing incidence interferometry has been applied for rough plane, cylindrical, acylindrical, and general rod-like surfaces using diffractive beam splitters. Here, we demonstrate that also rough convex steep rotational symmetric spherical or aspherical surfaces can be measured along one meridian in a single step using diffractive beam splitters and phase-shifting techniques. The extension to the whole surface can be attained by successive meridional measurements of the surface under test by azimuthal adjustments. The principle of the method is given and for a spherical ball lens as an extremely curved surface simulated, and experimental data are presented. The features of the interferogram are discussed, and the experimental evaluation of a single meridian including the unwrapped phase data is shown.
过去，掠入射干涉测量法已通过衍射分束器应用于粗糙平面、圆柱面、非圆柱面以及一般的棒状表面。在此，我们证明，使用衍射分束器和相移技术，还可以在单个步骤中沿一条子午线测量粗糙的凸形陡峭旋转对称球面或非球面。通过对被测表面进行方位角调整，连续进行子午线测量，可以实现对整个表面的测量扩展。给出了该方法的原理，并对一个作为极端弯曲表面的球形球透镜进行了模拟，还展示了实验数据。讨论了干涉图的特征，并给出了包括展开相位数据在内的单条子午线的实验评估结果。
