Bartels Randy A, Paul Ariel, Green Hans, Kapteyn Henry C, Murnane Margaret M, Backus Sterling, Christov Ivan P, Liu Yanwei, Attwood David, Jacobsen Chris
Department of Physics and JILA, University of Colorado and National Institute of Standards and Technology, Boulder, CO 80309-0440, USA.
Science. 2002 Jul 19;297(5580):376-8. doi: 10.1126/science.1072191.
We present spatial coherence measurements of extreme ultraviolet (EUV) light generated through the process of high-harmonic up-conversion of a femtosecond laser. With a phase-matched hollow-fiber geometry, the generated beam was found to exhibit essentially full spatial coherence. The coherence of this laser-like EUV source was shown by recording Gabor holograms of small objects. This work demonstrates the capability to perform EUV holography with a tabletop experimental setup. Such an EUV source, with low divergence and high spatial coherence, can be used for experiments involving high-precision metrology, inspection of optical components for EUV lithography, and microscopy and holography with nanometer resolution. Furthermore, the short time duration of the EUV radiation (a few femtoseconds) will enable EUV microscopy and holography to be performed with ultrahigh time resolution.
我们展示了通过飞秒激光的高谐波上转换过程产生的极紫外（EUV）光的空间相干性测量结果。在相位匹配的空心光纤几何结构中，发现所产生的光束基本上呈现出完全的空间相干性。通过记录小物体的伽博全息图，展示了这种类激光EUV源的相干性。这项工作证明了利用桌面实验装置进行EUV全息术的能力。这样一个具有低发散度和高空间相干性的EUV源，可用于涉及高精度计量、EUV光刻光学元件检测以及纳米分辨率显微镜和全息术的实验。此外，EUV辐射的短持续时间（几飞秒）将使EUV显微镜和全息术能够以超高时间分辨率进行。
