Jellison Gerald E, Griffiths C Owen, Holcomb David E, Rouleau Christopher M
Solid State Division, Oak Ridge National Laboratory, Tennessee 37831, USA.
Appl Opt. 2002 Nov 1;41(31):6555-66. doi: 10.1364/ao.41.006555.
The two-modulator generalized ellipsometer has been used to measure samples in transmission. In this configuration, the instrument can completely characterize a linear diattenuator and retarder, measuring birefringence, diattenuation, the angle of the principal axis, and the sample depolarization simultaneously and accurately. This instrument can be operated in two modes: (1) spectroscopic, in which measurements are made through the entire sample aperture as a function of wavelength, and (2) spatially resolved, in which measurements are made at a single wavelength and a birefringence picture is made of the sample. Current spatially resolved measurements have been made at a resolution of approximately 40 microm. Four samples have been examined with this instrument: (1) a mica plate, (2) a Polaroid polarizer, and (3) two quartz plates.
双调制广义椭圆偏振仪已用于透射模式下的样品测量。在此配置中，该仪器可以完整地表征线性二向色性元件和延迟器，同时准确测量双折射、二向色性、主轴角度和样品去偏振。该仪器可以在两种模式下运行：（1）光谱模式，通过整个样品孔径进行测量，测量结果是波长的函数；（2）空间分辨模式，在单一波长下进行测量，并生成样品的双折射图像。目前的空间分辨测量分辨率约为40微米。使用该仪器检查了四个样品：（1）云母片，（2）宝丽来偏光镜，以及（3）两块石英片。
