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透射双调制广义椭圆偏振测量法。

Transmission two-modulator generalized ellipsometry measurements.

作者信息

Jellison Gerald E, Griffiths C Owen, Holcomb David E, Rouleau Christopher M

机构信息

Solid State Division, Oak Ridge National Laboratory, Tennessee 37831, USA.

出版信息

Appl Opt. 2002 Nov 1;41(31):6555-66. doi: 10.1364/ao.41.006555.

Abstract

The two-modulator generalized ellipsometer has been used to measure samples in transmission. In this configuration, the instrument can completely characterize a linear diattenuator and retarder, measuring birefringence, diattenuation, the angle of the principal axis, and the sample depolarization simultaneously and accurately. This instrument can be operated in two modes: (1) spectroscopic, in which measurements are made through the entire sample aperture as a function of wavelength, and (2) spatially resolved, in which measurements are made at a single wavelength and a birefringence picture is made of the sample. Current spatially resolved measurements have been made at a resolution of approximately 40 microm. Four samples have been examined with this instrument: (1) a mica plate, (2) a Polaroid polarizer, and (3) two quartz plates.

摘要

双调制广义椭圆偏振仪已用于透射模式下的样品测量。在此配置中,该仪器可以完整地表征线性二向色性元件和延迟器,同时准确测量双折射、二向色性、主轴角度和样品去偏振。该仪器可以在两种模式下运行:(1)光谱模式,通过整个样品孔径进行测量,测量结果是波长的函数;(2)空间分辨模式,在单一波长下进行测量,并生成样品的双折射图像。目前的空间分辨测量分辨率约为40微米。使用该仪器检查了四个样品:(1)云母片,(2)宝丽来偏光镜,以及(3)两块石英片。

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