Elmazria Omar, Mortet Vincent, El Hakiki Mohamed, Nesladek Milos, Alnot Patrick
Laboratoire de Physique des Milieux Ionisés et Applications-UMR 7040, Université H. Poincaré, Nancy I, F-54506, France.
IEEE Trans Ultrason Ferroelectr Freq Control. 2003 Jun;50(6):710-5. doi: 10.1109/tuffc.2003.1209558.
High performances surface acoustic wave (SAW) filters based on aluminium nitride (AlN)/diamond layered structure have been fabricated. The C-axis oriented aluminum nitride films with various thicknesses were sputtered on unpolished nucleation side of free-standing polycrystalline chemical vapor deposition (CVD) diamond obtained by silicon substrate etching. Experimental results show that high order modes as well as Rayleigh waves are excited. Experimental results are in good agreement with the theoretical dispersion curves determined by software simulation with Green's function formalism. We demonstrate that high phase velocity first mode wave (so-called Sezawa wave) with high electromechanical coupling coefficient are obtained on AlN/diamond structure. This structure also has a low temperature coefficient of frequency (TCF), and preliminary results suggest that a zero TCF could be expected.
基于氮化铝（AlN）/金刚石层状结构的高性能表面声波（SAW）滤波器已被制备出来。将不同厚度的C轴取向氮化铝薄膜溅射在通过硅衬底蚀刻获得的自立式多晶化学气相沉积（CVD）金刚石的未抛光成核面上。实验结果表明，高阶模式以及瑞利波都被激发。实验结果与通过格林函数形式的软件模拟确定的理论色散曲线吻合良好。我们证明在AlN/金刚石结构上获得了具有高机电耦合系数的高相速度第一模式波（所谓的泽瓦波）。这种结构还具有低频率温度系数（TCF），初步结果表明有望实现零TCF。
