Burkov S I, Zolotova O P, Sorokin B P
Siberian Federal University, 79 Svobodny Ave., 660041 Krasnoyarsk, Russian Federation.
Siberian State Aerospace University, 31 Krasnoyarsky Rabochy Ave., 660014 Krasnoyarsk, Russian Federation.
Ultrasonics. 2018 Feb;83:188-193. doi: 10.1016/j.ultras.2017.03.013. Epub 2017 Mar 18.
The paper presents the results of computer simulation of the acoustic waves propagation in piezoelectric layered structures based on diamond substrate under the influence of various metal film deposition. It has been observed that the maximum phase velocity change Δv/v is achieved with an "Au/(001) AlN/Au/(100) diamond" PLS configuration. However, if the acoustic impedance of the metal layer is greater than the acoustic impedance of the substrate, an elastic wave reflection can be observed, reducing the Δv/v quantities. Obtained results may be useful in the development of resonant and sensor acousto-electronic devices based on the Rayleigh and Love waves.
本文展示了在各种金属膜沉积影响下，基于金刚石衬底的压电层状结构中声波传播的计算机模拟结果。已观察到，采用“Au/(001) AlN/Au/(100) 金刚石”的压电层状结构配置可实现最大相速度变化Δv/v。然而，如果金属层的声阻抗大于衬底的声阻抗，则可观察到弹性波反射，从而降低Δv/v值。所得结果可能有助于基于瑞利波和乐甫波开发谐振和传感声电设备。
