Li Cheuk-Wing, Cheung Chung Nam, Yang Jun, Tzang Chi Hung, Yang Mengsu
Department of Biology and Chemistry, City University of Hong Kong, 83 Tat Chee Avenue, Kowloon, Hong Kong, China.
Analyst. 2003 Sep;128(9):1137-42. doi: 10.1039/b304354a.
We have developed a method for fabricating microfluidic devices with multi-height structures using single step photolithography. The whole fabrication process is executed by conventional printed circuit board (PCB) technology without the need of having access to clean room facilities. Specifically designed "windows" and "rims" architectures were printed on films that were used as photomasks. Different levels of protruding features on the PCB master were produced by exposing a photomask followed by chemical wet etching. Poly(dimethylsiloxane) (PDMS) was then moulded against the positive relief master to generate microfluidic structures. In this report, we described the fabrication of a microfluidic device featured with a multi-height "sandbag" structure for particle entrapment and peripheral microchannels. Controlled immobilization of biological cells and immunocytochemcial staining assays were performed to demonstrate the applicability of the microfluidic device for cellular analysis. The integrity of the microdevice remained stable under applied pressure, indicating the robustness of the elastic PDMS structures for analytical operation. The simple microfabrication process requires only low-cost materials and minimal specialized equipment and can reproducibly produce mask lines of about 20 microm in width, which is sufficient for most microfluidic applications.
我们开发了一种利用单步光刻制造具有多高度结构的微流控装置的方法。整个制造过程通过传统印刷电路板（PCB）技术执行，无需使用洁净室设施。在用作光掩模的薄膜上印刷专门设计的“窗口”和“边缘”结构。通过曝光光掩模然后进行化学湿法蚀刻，在PCB母版上产生不同高度的突出特征。然后将聚二甲基硅氧烷（PDMS）模制在正性浮雕母版上以生成微流控结构。在本报告中，我们描述了一种具有多高度“沙袋”结构以捕获颗粒和周边微通道的微流控装置的制造。进行了生物细胞的可控固定和免疫细胞化学染色试验，以证明该微流控装置在细胞分析中的适用性。在施加压力下，微装置的完整性保持稳定，表明弹性PDMS结构在分析操作中的稳健性。这种简单的微制造工艺仅需要低成本材料和最少的专用设备，并且可以可重复地生产宽度约为20微米的掩模线，这对于大多数微流控应用来说已经足够。
