Hoffmann Marcus, Küppers Hartmut, Schneller Theodor, Böttger Ulrich, Schnakenberg Uwe, Mokwa Wilfried, Waser Rainer
Electroceramic Materials Research Laboratories, RWTH Aachen, Sommerfeldstrasse 24, 52074 Aachen, Germany.
IEEE Trans Ultrason Ferroelectr Freq Control. 2003 Oct;50(10):1240-6. doi: 10.1109/tuffc.2003.1244739.
High piezoelectric coupling coefficients of PZT-based material systems can be employed for actuator functions in micro-electro-mechanical systems (MEMS) offering displacements and forces which outperform standard solutions. This paper presents simulation, fabrication, and development results of a stress-compensated, PZT-coated cantilever concept in which a silicon bulk micromachining process is used in combination with a chemical solution deposition (CSD) technique. Due to an analytical approach and a finite element method (FEM) simulation for a tip displacement of 10 microm, the actuator was designed with a cantilever length of 300 microm to 1000 microm. Special attention was given to the Zr/Ti ratio of the PZT thin films to obtain a high piezoelectric coefficient. For first characterizations X-ray diffraction (XRD), scanning electron microscopy (SEM), hysteresis-, current-voltage I(V)- and capacitance-voltage C(V)-measurements were carried out.
基于PZT的材料系统的高压电耦合系数可用于微机电系统（MEMS）中的致动器功能，其提供的位移和力优于标准解决方案。本文介绍了一种应力补偿的、涂覆PZT的悬臂梁概念的模拟、制造和开发结果，其中硅体微加工工艺与化学溶液沉积（CSD）技术结合使用。由于对10微米的尖端位移采用了分析方法和有限元方法（FEM）模拟，致动器设计的悬臂梁长度为300微米至1000微米。特别关注PZT薄膜的Zr/Ti比，以获得高压电系数。为了进行首次表征，进行了X射线衍射（XRD）、扫描电子显微镜（SEM）、滞后、电流-电压I(V)和电容-电压C(V)测量。
