Han Arum, Wang Olivia, Graff Mason, Mohanty Swomitra K, Edwards Thayne L, Han Ki-Ho, Bruno Frazier A
School of Electrical & Computer Engineering, Georgia Institute of Technology, Atlanta, GA 30332-0250, USA.
Lab Chip. 2003 Aug;3(3):150-7. doi: 10.1039/b302118a. Epub 2003 Jun 18.
This paper describes an approach for fabricating multi-layer microfluidic systems from a combination of glass and plastic materials. Methods and characterization results for the microfabrication technologies underlying the process flow are presented. The approach is used to fabricate and characterize multi-layer plastic/glass microfluidic systems containing electrical and mechanical functionality. Hot embossing, heat staking of plastics, injection molding, microstenciling of electrodes, and stereolithography were combined with conventional MEMS fabrication techniques to realize the multi-layer systems. The approach enabled the integration of multiple plastic/glass materials into a single monolithic system, provided a solution for the integration of electrical functionality throughout the system, provided a mechanism for the inclusion of microactuators such as micropumps/valves, and provided an interconnect technology for interfacing fluids and electrical components between the micro system and the macro world.
本文描述了一种由玻璃和塑料材料组合制造多层微流体系统的方法。文中介绍了工艺流程所依据的微制造技术的方法和表征结果。该方法用于制造和表征包含电气和机械功能的多层塑料/玻璃微流体系统。热压印、塑料热铆接、注塑成型、电极微模版印刷和立体光刻与传统的微机电系统制造技术相结合，以实现多层系统。该方法能够将多种塑料/玻璃材料集成到单个整体系统中，为整个系统的电气功能集成提供了一种解决方案，为包含微泵/阀门等微致动器提供了一种机制，并为微系统与宏观世界之间的流体和电气部件接口提供了一种互连技术。
