Flannery Colm M, Whitfield Michael D, Jackman Richard B
IEEE Trans Ultrason Ferroelectr Freq Control. 2004 Mar;51(3):368-71.
"Ideal" diamond has the highest acoustic velocity of any material known, and is of great interest as a substrate material for high frequency surface acoustic wave (SAW) device structures. However, little is known of the acoustic wave propagation properties of polycrystalline diamond grown by chemical vapour deposition (CVD) techniques, the commercially accessible form of this material. We report on propagation of laser-generated SAW on three forms of freestanding CVD diamond samples, "white" polycrystalline, "black" polycrystalline, and "highly oriented" diamond. Despite differing sample nature, SAW waves propagating along the smooth (nucleation) side of the diamond showed similar velocities in the range 10600-11900 ms(-1). These results are discussed in terms of the potential of each form of CVD diamond for SAW device fabrication.
“理想”钻石具有已知任何材料中最高的声速,作为高频表面声波(SAW)器件结构的衬底材料备受关注。然而,对于通过化学气相沉积(CVD)技术生长的多晶钻石(这种材料的商业可用形式)的声波传播特性却知之甚少。我们报告了激光产生的表面声波在三种形式的独立CVD钻石样品上的传播情况,即“白色”多晶、“黑色”多晶和“高度取向”钻石。尽管样品性质不同,但沿钻石光滑(成核)面传播的表面声波速度在10600 - 11900 m·s⁻¹范围内相似。根据每种形式的CVD钻石在SAW器件制造方面的潜力对这些结果进行了讨论。