van der Linden Heiko, Olthuis Wouter, Bergveld Piet
Biosensors, Faculty of Electronics, Mathematics and Informatics, Twente University, 7500AE Enschede, The Netherlands.
Lab Chip. 2004 Dec;4(6):619-24. doi: 10.1039/b406247g. Epub 2004 Oct 21.
In this article a new method for the photolithographical deposition of temperature-sensitive hydrogels is presented. The method can be used in conjunction with standard 365 nm UV-photolithography to accurately dimension and position temperature-sensitive hydrogel microactuators in a highly parallel fashion. A number of characteristics of the hydrogels were investigated. These include: the photolithographical reproduction quality, the effect of the crosslinking density in the hydrogels on their swelling behavior, the swelling hysteresis behavior, the effect of dimensional constraints on the swelling of the hydrogels and the effect of copolymerization with an ionizable comonomer on the temperature behavior of the hydrogels. The method presents a considerable improvement in the microfabrication of temperature-sensitive hydrogel microactuators and has potential for the mass-fabrication of these interesting microactuators.
本文介绍了一种用于光刻沉积温度敏感水凝胶的新方法。该方法可与标准的365 nm紫外光刻技术结合使用，以高度并行的方式精确确定温度敏感水凝胶微致动器的尺寸和位置。研究了水凝胶的一些特性。这些特性包括：光刻复制质量、水凝胶中交联密度对其溶胀行为的影响、溶胀滞后行为、尺寸限制对水凝胶溶胀的影响以及与可电离共聚单体共聚对水凝胶温度行为的影响。该方法在温度敏感水凝胶微致动器的微制造方面有了显著改进，并且具有大规模制造这些有趣的微致动器的潜力。
