Klie R F, Zhu Y
Brookhaven National Laboratory, Center for Functional Nanomaterials, 76 Cornell Ave., Upton, NY 11973, USA.
Micron. 2005;36(3):219-31. doi: 10.1016/j.micron.2004.12.003. Epub 2005 Jan 12.
Atomic resolution scanning transmission electron microscopy (STEM) analysis, in particular the combination of Z-contrast imaging and electron energy-loss spectroscopy (EELS) has been successfully used to measure the atomic and electronic structure of materials with sub-nanometer spatial resolution. Furthermore, the combination of this incoherent imaging technique with EELS allows us to correlate certain structural features, such as defects or interfaces directly with the measured changes in the local electronic fine-structure. In this review, we will discuss the experimental procedures for achieving high-resolution Z-contrast imaging and EELS. We will describe the alignment and experimental setup for high-resolution STEM analysis and also describe some of our recent results where the combined use of atomic-resolution Z-contrast imaging and column-by-column EELS has helped solve important materials science problems.
原子分辨率扫描透射电子显微镜（STEM）分析，特别是Z衬度成像与电子能量损失谱（EELS）的结合，已成功用于以亚纳米空间分辨率测量材料的原子和电子结构。此外，这种非相干成像技术与EELS的结合使我们能够将某些结构特征，如缺陷或界面，直接与局部电子精细结构的测量变化相关联。在这篇综述中，我们将讨论实现高分辨率Z衬度成像和EELS的实验程序。我们将描述高分辨率STEM分析的对准和实验装置，并介绍一些我们最近的结果，其中原子分辨率Z衬度成像和逐列EELS的联合使用有助于解决重要的材料科学问题。
