Laabs Holger, Keenan Darryl A, Yang Shao, Dowell Marla L
Optoelectronics Division, National Institute of Standards and Technology, Boulder, Colorado 80305-3328, USA.
Appl Opt. 2005 Feb 20;44(6):841-8. doi: 10.1364/ao.44.000841.
We have developed a measurement system based on a correlation method to characterize the nonlinearity of a detector's response over a large range of laser pulse energy. The system consists of an excimer-laser source, beam-shaping optics, a beam splitter, a monitor detector, a set of optical filters, and the detector under test. Detector nonlinearities as large as 10% or greater over an entire measurement range at an excimer-laser wavelength of 193 nm are observed. The measurement range of the current system is approximately 300 nJ to 50 mJ of laser pulse energy at the detector under test. The typical expanded measurement uncertainty of nonlinearity is 0.6% (k = 2).
我们开发了一种基于相关方法的测量系统，用于表征探测器在大范围激光脉冲能量下响应的非线性特性。该系统由准分子激光源、光束整形光学器件、分束器、监测探测器、一组光学滤波器以及被测探测器组成。在193nm准分子激光波长下，观察到在整个测量范围内探测器非线性高达10%或更高。当前系统在被测探测器处的激光脉冲能量测量范围约为300nJ至50mJ。非线性的典型扩展测量不确定度为0.6%（k = 2）。
