Stability of microfabricated high aspect ratio structures in poly(dimethylsiloxane).

The stability of structures microfabricated in soft elastomeric polymers is an important concern in most applications that use these structures. Although relevant for several applications, the collapse to the ground of high aspect ratio structures (ground collapse) is still poorly understood. The stability of soft microfabricated high aspect ratio structures versus ground collapse was experimentally assessed, and a new model of ground collapse involving adhesion was developed. Sets of posts with diameters from 0.36 to 2.29 microm were fabricated in poly(dimethylsiloxane) and tested in air or immersed in water and ethanol to change the work of adhesion. The critical aspect ratio (the highest length-to-width ratio for which a post is not at risk of collapsing) was determined as a function of the diameter. The critical aspect ratio in air ranged from 2 to 4 and increased with the diameter. Work of adhesion was found to be determinant for and inversely correlated to stability. These results highlight the role played by adhesion and offer the possibility of improving stability by reducing the work of adhesion. The ground collapse model developed accounted for the main features of structure stability. The results indicate that ground collapse can be a limiting factor in the design of soft polymer structures.