Stoykovich Mark P, Müller Marcus, Kim Sang Ouk, Solak Harun H, Edwards Erik W, de Pablo Juan J, Nealey Paul F
Department of Chemical and Biological Engineering and Center for Nanotechnology, University of Wisconsin (UW), Madison, WI 53706, USA.
Science. 2005 Jun 3;308(5727):1442-6. doi: 10.1126/science.1111041.
Self-assembly is an effective strategy for the creation of periodic structures at the nanoscale. However, because microelectronic devices use free-form design principles, the insertion point of self-assembling materials into existing nanomanufacturing processes is unclear. We directed ternary blends of diblock copolymers and homopolymers that naturally form periodic arrays to assemble into nonregular device-oriented structures on chemically nanopatterned substrates. Redistribution of homopolymer facilitates the defect-free assembly in locations where the domain dimensions deviate substantially from those formed in the bulk. The ability to pattern nonregular structures using self-assembling materials creates new opportunities for nanoscale manufacturing.
自组装是在纳米尺度上创建周期性结构的有效策略。然而，由于微电子器件采用自由形式的设计原则，自组装材料在现有纳米制造工艺中的插入点尚不清楚。我们引导天然形成周期性阵列的二嵌段共聚物和均聚物的三元共混物，在化学纳米图案化的基板上组装成面向器件的非规则结构。均聚物的重新分布有助于在畴尺寸与本体中形成的尺寸有很大偏差的位置进行无缺陷组装。利用自组装材料对非规则结构进行图案化的能力为纳米制造创造了新的机会。
