球差校正透射电子显微镜和扫描透射电子显微镜的实验评估
Experimental evaluation of a spherical aberration-corrected TEM and STEM.
作者信息
Sawada Hidetaka, Tomita Takeshi, Naruse Mikio, Honda Toshikazu, Hambridge Paul, Hartel Peter, Haider Maximilian, Hetherington Crispin, Doole Ron, Kirkland Angus, Hutchison John, Titchmarsh John, Cockayne David
出版信息
J Electron Microsc (Tokyo). 2005 Apr;54(2):119-21. doi: 10.1093/jmicro/dfi001. Epub 2005 Jun 22.
We have successfully developed a spherical aberration (Cs)-corrected electron microscope for probe- and image-forming systems using hexapole correctors. The performance of the microscope has been evaluated experimentally. The point resolution attained using the image-forming Cs-corrector is better than 0.12 nm. For scanning transmission electron microscopy, the Ronchigram flat area was >40 mrad in half-angle using the probe-forming Cs-corrector.
我们已成功开发出一种使用六极校正器的用于探针和成像系统的球差（Cs）校正电子显微镜。已通过实验对该显微镜的性能进行了评估。使用成像Cs校正器获得的点分辨率优于0.12纳米。对于扫描透射电子显微镜，使用探针形成Cs校正器时，在半角处的朗奇图平坦区域大于40毫弧度。
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