Reichelt Stephan, Zappe Hans
Laboratory for Micro-Optics, Institute of Microsystem Technology, University of Freiburg, Georges-Koehler-Allee 102, 79110 Freiburg, Germany.
Appl Opt. 2005 Sep 20;44(27):5786-92. doi: 10.1364/ao.44.005786.
A new interferometer design for microlens testing is presented. The phase-shifting system combines the advantages of a Twyman-Green and a Mach-Zehnder interferometer and permits full characterization of the aberrations of microlenses as well as radius of curvature and focal length measurements. The Twyman-Green system is applied to surface testing in reflection (single reflection), whereas the Mach-Zehnder system is used for lens testing in transmission (single pass). Both measurements are performed without removal of the test part, allowing for combination of the results without confusion of the actual lens and without an azimuthal orientation error. The interferometer setup is explained, the test procedure is described, and experimental results are given.
本文提出了一种用于微透镜测试的新型干涉仪设计。相移系统结合了泰曼-格林干涉仪和马赫-曾德尔干涉仪的优点，能够全面表征微透镜的像差以及测量曲率半径和焦距。泰曼-格林系统用于反射式表面测试（单次反射），而马赫-曾德尔系统用于透射式透镜测试（单次通过）。这两种测量均在不移除测试部件的情况下进行，从而可以将结果合并，而不会混淆实际透镜且不会产生方位角定向误差。文中解释了干涉仪设置，描述了测试程序，并给出了实验结果。
