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使用无运动主动可调谐泰曼-格林干涉仪同时进行厚度和相位指数测量。

Simultaneous thickness and phase index measurements with a motion-free actively tunable Twyman-Green interferometer.

作者信息

Reza Syed Azer, Imeri Arjent

出版信息

Appl Opt. 2023 May 20;62(15):3948-3958. doi: 10.1364/AO.489084.

Abstract

In this paper, we present a scheme to simultaneously measure the thickness and refractive index of parallel plate samples, involving no bulk mechanical motion, by deploying an electronically tunable Twyman-Green interferometer configuration. The active electronic control with no bulk mechanical motion is realized via the introduction of a tunable focus lens within the classical motion-based Twyman-Green interferometer configuration. The resulting interferometer is repeatable and delivers accurate estimates of the thickness and refractive index of a sample under test. Elimination of bulk motion also promises a potential for miniaturization. We develop a theoretical model for estimating sample thickness and index values using this reconfigurable interferometer setup and present detailed experimental results that demonstrate the working principle of the proposed interferometer.

摘要

在本文中,我们提出了一种通过部署电子可调谐的泰曼-格林干涉仪配置来同时测量平行板样品厚度和折射率的方案,该方案不涉及整体机械运动。通过在基于经典运动的泰曼-格林干涉仪配置中引入可调焦透镜,实现了无整体机械运动的有源电子控制。所得干涉仪具有可重复性,能够准确估计被测样品的厚度和折射率。消除整体运动也为小型化带来了潜力。我们利用这种可重构干涉仪设置开发了一个用于估计样品厚度和折射率值的理论模型,并给出了详细的实验结果,证明了所提出干涉仪的工作原理。

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