Ross F M, Tersoff J, Reuter M C
IBM Research Division, T. J. Watson Research Center, P.O. Box 218, Yorktown Heights, New York 10598, USA.
Phys Rev Lett. 2005 Sep 30;95(14):146104. doi: 10.1103/PhysRevLett.95.146104. Epub 2005 Sep 29.
We observe in situ the vapor-liquid-solid (VLS) growth of Si nanowires, in UHV-CVD using Au catalyst. The nanowire sidewalls exhibit periodic sawtooth faceting, reflecting an oscillatory growth process. We interpret the facet alternation as resulting from the interplay of the geometry and surface energies of the wire and liquid droplet. Such faceting may be present in any VLS growth system in which there are no stable orientations parallel to the growth direction. The sawtooth structure has important implications for electronic mobility and scattering in nanowire devices.
我们在超高真空化学气相沉积(UHV-CVD)中使用金催化剂原位观察了硅纳米线的气-液-固(VLS)生长过程。纳米线的侧壁呈现出周期性的锯齿状刻面,这反映了一个振荡生长过程。我们将这种刻面交替现象解释为纳米线与液滴的几何形状和表面能相互作用的结果。这种刻面可能存在于任何没有与生长方向平行的稳定取向的VLS生长系统中。锯齿状结构对纳米线器件中的电子迁移率和散射具有重要影响。