Miller Jordan S, Béthencourt Mathilde I, Hahn Mariah, Lee T Randall, West Jennifer L
Department of Bioengineering, Rice University, P.O. Box 1892, MS-142, Houston, Texas 77251-1892, USA.
Biotechnol Bioeng. 2006 Apr 20;93(6):1060-8. doi: 10.1002/bit.20809.
We report the development of laser-scanning lithography (LSL), which employs a laser-scanning confocal microscope to pattern photoresists that can be utilized, for example, in the fabrication of masters for use in soft lithography. This convenient technique provides even exposure across the entire view field and facilitates accurate alignment of successive photoresist exposures. Features on the scale of 3 microm have been achieved to date with a 10x objective (NA 0.45). Virtual masks, instructions for laser irradiation, were drawn using the Region of Interest (ROI) function of a Zeiss LSM 510 microscope. These regions were then exposed to a 458 nm argon laser for 32 micros (0.9 mW/microm(2)). Differential interference contrast (DIC) imaging was utilized with a non-destructive 514 nm argon laser as an immediate quality check of each exposure, to align successive exposures, and to reduce chromatic aberration between imaging and exposure. Developed masters were replica-molded with poly(dimethylsiloxane) (PDMS); these masters were then utilized for microcontact printing of cell-adhesive self-assembled monolayers (SAMs) to demonstrate the utility of this process. Initial studies confirmed that human dermal fibroblast adhesion and spreading were limited to cell-adhesive SAM areas. LSL is a rapid, flexible, and readily available technique that will accelerate master design and preparation; moreover, it can be applied to additional forms of photolithography and photopolymerization for studies in cell biology, biomaterials design and evaluation, materials science, and surface chemistry.
我们报告了激光扫描光刻技术(LSL)的发展情况,该技术采用激光扫描共聚焦显微镜对光刻胶进行图案化处理,例如可用于制造软光刻用的母版。这种便捷技术能在整个视场实现均匀曝光,并便于连续光刻胶曝光的精确对准。使用10倍物镜(数值孔径0.45)至今已实现了3微米尺度的特征。利用蔡司LSM 510显微镜的感兴趣区域(ROI)功能绘制虚拟掩膜,即激光照射指令。然后将这些区域暴露于458纳米氩激光下32微秒(0.9毫瓦/微米²)。使用无损的514纳米氩激光进行微分干涉对比(DIC)成像,作为每次曝光的即时质量检查,以对准连续曝光,并减少成像与曝光之间的色差。将显影后的母版用聚二甲基硅氧烷(PDMS)进行复制模塑;然后将这些母版用于细胞粘附性自组装单层膜(SAMs)的微接触印刷,以证明该工艺的实用性。初步研究证实,人真皮成纤维细胞的粘附和铺展仅限于细胞粘附性SAM区域。LSL是一种快速、灵活且易于获得的技术,将加速母版设计和制备;此外,它可应用于细胞生物学、生物材料设计与评估、材料科学和表面化学研究中的其他形式光刻和光聚合反应。