Stampfer C, Helbling T, Obergfell D, Schöberle B, Tripp M K, Jungen A, Roth S, Bright V M, Hierold C
Micro and Nanosystems, ETH Zurich, 8092 Zurich, Switzerland.
Nano Lett. 2006 Feb;6(2):233-7. doi: 10.1021/nl052171d.
We report on the fabrication and characterization of bulk micromachined pressure sensors based on individual single-walled carbon nanotubes (SWNTs) as the active electromechanical transducer elements. The electromechanical sensor device consists of an individual electrically connected SWNT adsorbed on top of a 100-nm-thick atomic layer deposited (ALD) circular alumina (Al(2)O(3)) membrane with a radius in the range of 50-100 microm. A white light interferometer (WLI) was used to measure the deflection of the membrane due to differential pressure, and the mechanical properties of the device were characterized by bulge testing. Finally, we performed the first electromechanical measurements on strained metallic SWNTs adhering to a membrane and found a piezoresistive gauge factor of approximately 210 for metallic SWNTs.
我们报告了基于单个单壁碳纳米管（SWNTs）作为有源机电换能器元件的体微机械压力传感器的制造与特性。该机电传感器装置由吸附在半径为50 - 100微米、厚度为100纳米的原子层沉积（ALD）圆形氧化铝（Al₂O₃）膜顶部的单个电连接SWNT组成。使用白光干涉仪（WLI）测量由于压差导致的膜的挠度，并通过鼓包测试表征该装置的机械性能。最后，我们对附着在膜上的应变金属SWNTs进行了首次机电测量，发现金属SWNTs的压阻系数约为210。
