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监测器通带宽度对密集波分复用滤波器沉积过程中层厚度测定的影响。

Influence of monitor passband width on the layer thickness determination during deposition of a dense-wavelength-division-multiplexing filter.

作者信息

Lee Cheng-Chung, Kuo Chien-Cheng, Chen Sheng-Hui

机构信息

Thin Film Technology Center and Institute of Optical Sciences, National Central University, Chung-Li 32001, Taiwan, China.

出版信息

Appl Opt. 2006 Mar 1;45(7):1344-8. doi: 10.1364/ao.45.001344.

Abstract

The monitor passband width of an optical monitor is an important parameter for the fabrication of a dense-wavelength-division-multiplexing (DWDM) filter. The peak insertion loss and transmittance of one-cavity narrow-bandpass filters (NBPFs) were analyzed by using different passband widths. The simulation monitoring curves of the last layer of the first, second, third, and fourth cavities of a five-cavity DWDM filter with different monitor passband widths were investigated. The last layer of each cavity is very sensitive to the monitor passband width, showing that the monitor passband width of an optical monitor should be less than half the designed passband width. This analysis demonstrates the successful fabrication of a five-cavity DWDM filter.

摘要

光学监测器的监测通带宽度是制造密集波分复用(DWDM)滤波器的一个重要参数。通过使用不同的通带宽度,分析了单腔窄带通滤波器(NBPF)的峰值插入损耗和透过率。研究了具有不同监测通带宽度的五腔DWDM滤波器第一、二、三、四腔最后一层的模拟监测曲线。每个腔的最后一层对监测通带宽度非常敏感,这表明光学监测器的监测通带宽度应小于设计通带宽度的一半。该分析证明了五腔DWDM滤波器的成功制造。

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