用经高压釜溶胶制成的氟化物纳米颗粒薄膜制备高性能光学涂层。

Preparation of high-performance optical coatings with fluoride nanoparticle films made from autoclaved sols.

作者信息

Murata Tsuyoshi, Ishizawa Hitoshi, Motoyama Izumi, Tanaka Akira

机构信息

Department of Lens Engineering Development, Production Technology Headquarters, Core Technology Center, Nikon Corporation, 10-1, Asamizodai 1-chome, Sagamihara, Kanagawa 228-0828, Japan.

出版信息

Appl Opt. 2006 Mar 1;45(7):1465-8. doi: 10.1364/ao.45.001465.

DOI:10.1364/ao.45.001465

PMID:16539251

Abstract

An ultralow refractive index is very advantageous when one designs antireflective coatings. We successfully obtained high-quality MgF2 thin films with ultralow refractive indices from autoclaved sols prepared from magnesium acetate and hydrofluoric acid. The MgF2 films consist of nanosized particles, and they have high laser-exposure durability at 193 nm. The reflectance of the antireflective coating with five layers, of which the top layer is formed by our method, is lower than 0.6% in the incident angle range of 0 degrees - 60 degrees at 193 nm.

摘要

在设计抗反射涂层时，超低折射率非常有利。我们通过由醋酸镁和氢氟酸制备的高压釜溶胶成功获得了具有超低折射率的高质量MgF₂薄膜。MgF₂薄膜由纳米尺寸的颗粒组成，并且在193nm处具有高激光曝光耐久性。在193nm处，顶层采用我们的方法形成的五层抗反射涂层在0度至60度的入射角范围内的反射率低于0.6%。