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迈向完美的抗反射涂层。3. 使用剩余射线材料获得的实验结果。

Toward perfect antireflection coatings. 3. Experimental results obtained with the use of Reststrahlen materials.

作者信息

Dobrowolski J A, Guo Yanen, Tiwald Tom, Ma Penghui, Poitras Daniel

机构信息

Institute for Microstructural Sciences, National Research Council of Canada, 1200 Montreal Road, Ottawa, K1A 0R6 Canada.

出版信息

Appl Opt. 2006 Mar 1;45(7):1555-62. doi: 10.1364/ao.45.001555.

DOI:10.1364/ao.45.001555
PMID:16539263
Abstract

The equipment and methods used to produce wide-angle antireflection coatings based on Reststrahlen materials are described. The optical constants of the coating materials used in the construction of the multilayers were determined by spectrophotometric ellipsometry and are compared with the literature values. The measured performance of an experimentally produced antireflection coating is compared with the expected calculated performance. The reflectance is low over a wide range of angles, but only in the narrow-wavelength region at which the refractive index of the Reststrahlen material is close to unity.

摘要

描述了用于制备基于Reststrahlen材料的广角减反射涂层的设备和方法。通过分光光度椭圆偏振法测定了用于构建多层膜的涂层材料的光学常数,并与文献值进行了比较。将实验制备的减反射涂层的测量性能与预期的计算性能进行了比较。在很宽的角度范围内反射率都很低,但仅在Reststrahlen材料的折射率接近1的窄波长区域内如此。

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