Yihong Wang, Zhiyong Yu, Tan Yibin, Ning Gu, Wesche K D
State Key Laboratory of Bioelectronics, Jiangsu Laboratory for Biomaterials and Devices, Department of Chemistry and Chemical Engineering, Southeast University, Nanjing, P R China.
J Nanosci Nanotechnol. 2006 Apr;6(4):1185-7. doi: 10.1166/jnn.2006.177.
The tips of the probes are the key components in scanning probe microscopes and their applications in nano-scale imaging and nanofabrications. We investigated first the change of near-field scanning optical microscopy probe tips from optical fiber against time by chemical static etching. Several coverlayer-hydrofluoric acid aqueous solution systems and their possible factors affecting the tips' profile were studied. Tips with shorter tapers, larger conical aperture angles, and reproducible shapes were successfully obtained in high yields. It was found that the taper profiles were affected to a great extent by the one-dimensional linear diffusion of etchants in the coverlayer caused by concentration gradients and convection.
探针尖端是扫描探针显微镜及其在纳米尺度成像和纳米加工应用中的关键部件。我们首先通过化学静态蚀刻研究了光纤近场扫描光学显微镜探针尖端随时间的变化。研究了几种覆盖层 - 氢氟酸水溶液体系及其可能影响尖端轮廓的因素。成功以高产率获得了具有较短锥度、较大圆锥孔径角和可重复形状的尖端。发现蚀刻剂在覆盖层中由浓度梯度和对流引起的一维线性扩散在很大程度上影响了锥度轮廓。
