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利用动态弯月面蚀刻对近场探针进行形状控制。

Shape control of near-field probes using dynamic meniscus etching.

作者信息

Haber L H, Schaller R D, Johnson J C, Saykally R J

机构信息

Department of Chemistry, University of California, Berkeley, CA 94720-1460, USA.

出版信息

J Microsc. 2004 Apr;214(Pt 1):27-35. doi: 10.1111/j.0022-2720.2004.01308.x.

DOI:10.1111/j.0022-2720.2004.01308.x
PMID:15049865
Abstract

Dynamic etching methods for fabricating fibre optic tips are explored and modelled. By vertically translating the fibre during etching by an HF solution under an organic protective layer, a variety of tip shapes were created. The probe taper lengths, cone angles and geometrical probe shapes were measured in order to evaluate the dynamic meniscus etching process. Fibre motion, etching rate, meniscus distortion and etching time were all found to be important variables that can be used to control the final probe shape.

摘要

对制造光纤尖端的动态蚀刻方法进行了探索和建模。通过在有机保护层下用氢氟酸溶液蚀刻期间垂直移动光纤,制造出了各种尖端形状。测量了探针的锥度长度、锥角和几何形状,以评估动态弯月面蚀刻过程。发现光纤运动、蚀刻速率、弯月面变形和蚀刻时间都是可用于控制最终探针形状的重要变量。

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