Ye Jianhui, Zentel Rudolf, Arpiainen Sanna, Ahopelto Jouni, Jonsson Fredrik, Romanov Sergei G, Sotomayor Torres Clivia M
Department of Chemistry, University of Mainz, Duesbergerweg 10-14, D-55099 Mainz, Germany.
Langmuir. 2006 Aug 15;22(17):7378-83. doi: 10.1021/la0607611.
We report on the fabrication of high-quality opaline photonic crystals from large silica spheres (diameter of 890 nm), self-assembled in hydrophilic trenches of silicon wafers by using a novel technique coined a combination of "lifting and stirring". The achievements reported here comprise a spatial selectivity of opal crystallization without special treatment of the wafer surface, a filling of the trenches up to the top, leading to a spatially uniform film thickness, particularly an absence of cracks within the size of the trenches, and finally a good 3D order of the opal lattice even in trenches with a complex confined geometry, verified using optical measurements. The opal lattice was found to match the pattern precisely in width as well as depth, providing an important step toward applications of opals in integrated optics.
我们报道了通过一种名为“提升与搅拌”相结合的新技术，由大尺寸二氧化硅球体（直径890纳米）在硅片的亲水性沟槽中自组装制备高质量蛋白石光子晶体的过程。这里报道的成果包括：蛋白石结晶具有空间选择性，无需对晶圆表面进行特殊处理；沟槽填充至顶部，从而实现空间均匀的膜厚；特别是在沟槽尺寸范围内没有裂缝；最后，即使在具有复杂受限几何形状的沟槽中，蛋白石晶格也具有良好的三维有序性，这通过光学测量得到了验证。发现蛋白石晶格在宽度和深度上都与图案精确匹配，这为蛋白石在集成光学中的应用迈出了重要一步。
