Chemical sensors based on micromachined transducers with integrated piezoresistive readout.

We demonstrate an approach for the development of chemical sensors utilizing silicon micromachined physical transducers with integrated piezoresistive readout. Originally, these transducers were developed and optimized as sensitive accelerometers for automotive applications. However, by applying a chemically responsive layer onto the transducer, we convert these transducers into chemical sensors. These transducers are attractive for chemical sensing applications for several key reasons. First, the required sensitivity of the chemical sensor can be achieved by choosing the right spring constant of the transducer. Second, the integrated piezoresistive readout of the transducer is already optimized and is very straightforward, providing a desired reproducibility in measurements, while not requiring bulky equipment. Third, chemically responsive film deposition is simple due to the ease of access to the transducer's surface. Fourth, such transducers are already available for another (automotive) application, making these sensors very cost-effective. The applicability of this approach is illustrated by the fabrication of highly sensitive CO2 sensors. To study hysteresis effects, we selected high CO2 concentrations (10-100% CO2) to provide the worst-case scenario for the sensor operation. These sensors demonstrate a hysteresis-free performance over the concentration range from 10 to 100% vol CO2, have detection limits of 160-370 ppm of CO2, and exhibit a relatively rapid response time, T(90) = 45 s. Importantly, we demonstrate a simple method for cancellation of vibration effects when these physical transducers, initially developed as accelerometers, are applied as chemical sensors.